Si/SiO2 interface

• Atomic structure
• Electronic structure and kinetic phenomena
• Optics
• Oxidation
• see also Silicon dioxide

Hirose K, Nohira H, Azuma K, Hattori T, Photoelectron spectroscopy studies of SiO₂/Si interfaces, Prog Surf Sci 82, 3 (2007)

Helms C R, Poindexter E H, The silicon-silicon-dioxide system: its microstructure and imperfections, RPP 57, 791 (1994)

The physics and chemistry of SiO₂ and Si-SiO₂ interface, ed Helms C R, Deal B E (Plenum, New York, 1988)

Giustino F, Bongiorno A, Pasquarello A, Atomistic models of the Si(100)-SiO₂ interface: structural, electronic and dielectric properties, JPC 17, S2065 (2005)

Related materials

Lee J-C etal, Chemical structure of the interface in ultrathin HfO₂/Si films, APL 84, 1305 (2004)

Puthenkovilakam R, Chang J P, Valence band structure and band alignment at the ZrO₂/Si interface, APL 84, 1353 (2004)

Puthenkovilakam R, Carter E A, Chang J P, First-principles exploration of alternative gate dielectrics: Electronic structure of ZrO₂/Si and ZrSiO₄/Si interfaces, PRB 69, 155329 (2004)